Invention Grant
- Patent Title: Physical quantity sensor, electronic apparatus and vehicle
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Application No.: US16665809Application Date: 2019-10-28
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Publication No.: US11099206B2Publication Date: 2021-08-24
- Inventor: Yoshiyuki Matsuura
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JPJP2018203181 20181029
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
The physical quantity sensor includes a substrate of which thickness direction is in the direction along the Z axis, and a sensor element provided on the substrate to detect a physical quantity, wherein the sensor element includes a movable part which is displaced in a direction along the X axis that is an axis for measuring the physical quantity with respect to the substrate, and a fixed electrode fixed to the substrate, and the movable part includes a movable electrode disposed to face the fixed electrode in the direction along the X axis, and a mass portion that supports the movable electrode and has a longer length than the movable electrode in a direction along the Z axis.
Information query
IPC分类: