Invention Grant
- Patent Title: Multilayer wiring base plate and probe card using the same
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Application No.: US16097757Application Date: 2017-04-06
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Publication No.: US11099227B2Publication Date: 2021-08-24
- Inventor: Noboru Otabe , Yoshiyuki Fukami
- Applicant: Kabushiki Kaisha Nihon Micronics
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee: Kabushiki Kaisha Nihon Micronics
- Current Assignee Address: JP Tokyo
- Agency: Lorenz & Kopf, LLP
- Priority: JPJP2016-093025 20160506
- International Application: PCT/JP2017/014387 WO 20170406
- International Announcement: WO2017/191726 WO 20171109
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/073 ; H05K1/02 ; H05K1/16

Abstract:
Included are an insulating plate 41 including a plurality of insulating synthetic resin layers, wiring circuits 44a, 44b, and 44c provided in the insulating plate 41, a thin-film resistor 46 formed to be buried in the insulating plate 41 and electrically connected to the wiring circuits 44a, 44b, and 44c, a heat dissipating portion 47 provided over one surface of the insulating plate to be opposed to the thin-film resistor 46 via a part of the plurality of insulating synthetic resin layers and having higher heat conductivity than that of the insulating plate 41, a pedestal portion 48 formed to be buried in the insulating plate 41 and provided to be opposed to the thin-film resistor 46 via a part of the plurality of insulating synthetic resin layers on an opposite side of the heat dissipating portion 47 and having higher heat conductivity than that of the insulating plate 41, and a heat dissipation and pedestal connecting portion 49 connecting the heat dissipating portion 47 to the pedestal portion 48 and having higher heat conductivity than that of the insulating plate 41.
Information query