Invention Grant
- Patent Title: Resist composition, method of forming resist pattern, polymeric compound, and copolymer
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Application No.: US16334302Application Date: 2017-10-04
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Publication No.: US11099479B2Publication Date: 2021-08-24
- Inventor: Takashi Nagamine , Hideto Nito , Masafumi Fujisaki , Tatsuya Fujii , Yuki Fukumura , Takahiro Kojima , Issei Suzuki , Takuya Ikeda , KhanhTin Nguyen
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JPJP2016-197492 20161005,JPJP2017-176005 20170913
- International Application: PCT/JP2017/036151 WO 20171004
- International Announcement: WO2018/066606 WO 20180412
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C08F20/26 ; G03F7/20 ; G03F7/038

Abstract:
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a polymeric compound having a structural unit represented by general formula (a0-1) (wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; Va0 represents a divalent hydrocarbon group; na0 represents an integer of 0 to 2; Ra00 represents an acid dissociable group represented by general formula (a0-r1-1); Ra01 and Ra02 represents a hydrocarbon group; Ra01 and Ra02 may be mutually bonded to form a ring; Ya0 represents a quaternary carbon atom; Ra031, Ra032 and Ra033 each independently represents a hydrocarbon group, provided that at least one of Ra031, Ra032 and Ra033 is a hydrocarbon group having a polar group).
Public/Granted literature
- US20190219920A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, AND COPOLYMER Public/Granted day:2019-07-18
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