Invention Grant
- Patent Title: Nanosecond pulser ADC system
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Application No.: US16848830Application Date: 2020-04-14
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Publication No.: US11101108B2Publication Date: 2021-08-24
- Inventor: Ilia Slobodov , John Carscadden , Kenneth Miller , Timothy Ziemba , Huatsern Yeager , Eric Hanson , TaiSheng Yeager , Kevin Muggli
- Applicant: Eagle Harbor Technologies, Inc.
- Applicant Address: US WA Seattle
- Assignee: Eagle Harbor Technologies, Inc.
- Current Assignee: Eagle Harbor Technologies, Inc.
- Current Assignee Address: US WA Seattle
- Agency: Sanders IP Law
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/683 ; H01L21/687 ; H02M3/335 ; H03K3/57 ; H05K7/20 ; H03M1/12

Abstract:
A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.
Public/Granted literature
- US20200244254A1 NANOSECOND PULSER ADC SYSTEM Public/Granted day:2020-07-30
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