Invention Grant
- Patent Title: Metal-insulator-metal (MIM) capacitor
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Application No.: US16741921Application Date: 2020-01-14
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Publication No.: US11101208B2Publication Date: 2021-08-24
- Inventor: Yaojian Leng
- Applicant: Microchip Technology Incorporated
- Applicant Address: US AZ Chandler
- Assignee: Microchip Technology Incorporated
- Current Assignee: Microchip Technology Incorporated
- Current Assignee Address: US AZ Chandler
- Agency: Slayden Grubert Beard PLLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L49/02 ; H01L23/532 ; H01L23/48 ; H01L23/00

Abstract:
A process of forming a metal-insulator-metal (MIM) capacitor may be incorporated into a process of forming metal bond pads connected directly to a top metal interconnect layer (e.g., Cu MTOP). The MIM capacitor may include a dielectric layer formed between a bottom plate defined by the Cu MTOP and a top plate comprising an extension of, or connected directly to, a metal bond pad formed above the Cu MTOP. The process of forming the MIM capacitor may include etching an opening in a passivation layer formed over the Cu MTOP to expose a top surface of the Cu MTOP, forming a dielectric layer extending into the passivation layer opening and onto the exposed Cu MTOP surface, removing portions of the dielectric layer to define a capacitor dielectric, and depositing bond pad metal extending into the passivation layer opening and onto the capacitor dielectric, to define the MIM capacitor top plate.
Public/Granted literature
- US20210043560A1 METAL-INSULATOR-METAL (MIM) CAPACITOR Public/Granted day:2021-02-11
Information query
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