Invention Grant
- Patent Title: DRAM and method for manufacturing the same
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Application No.: US16812065Application Date: 2020-03-06
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Publication No.: US11101272B2Publication Date: 2021-08-24
- Inventor: Chih-Hao Lin
- Applicant: WINBOND ELECTRONICS CORP.
- Applicant Address: TW Taichung
- Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee: WINBOND ELECTRONICS CORP.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW108107712 20190308
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A dynamic random access memory and its manufacturing method are provided. The memory includes a buried bit line, a plurality of buried word lines, a bit line contact structure, and a conductive plug. The buried bit line is formed in a substrate. A bottom surface of the buried word line is higher than a top surface of the buried bit line. The bit line contact structure is formed on the buried bit line and has a through hole. The bit line contact structure is not in direct contact with the buried bit line. A material of the bit line contact structure is different from a material of the buried bit line. The conductive plug is formed between the bit line contact structure and the buried bit line and fills the through hole, so that the bit line contact structure and the buried bit line are electrically connected.
Public/Granted literature
- US20200286894A1 DRAM AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-09-10
Information query
IPC分类: