Method and apparatus for manufacturing flexible light-emitting device
Abstract:
According to a flexible light-emitting device production method of the present disclosure, after an intermediate region and flexible substrate regions of a plastic film of a multilayer stack are divided from one another, the interface between the flexible substrate regions and a glass base is irradiated with lift-off light. The multilayer stack is separated into a first portion and a second portion while the multilayer stack is in contact with a stage. The first portion includes a plurality of light-emitting devices which are in contact with the stage. The light-emitting devices include a plurality of functional layer regions and the flexible substrate regions. The second portion includes the glass base and the intermediate region. The stage has ejection holes in a region which is to face the intermediate region, from which a fluid is ejected in the separation step.
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