Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16905027Application Date: 2020-06-18
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Publication No.: US11107815B2Publication Date: 2021-08-31
- Inventor: Sungmin Kim , Dongwon Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0037112 20170323
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/423 ; H01L29/78 ; H01L29/786 ; H01L29/66

Abstract:
A semiconductor device includes: channel patterns disposed on a substrate; a pair of source/drain patterns disposed at first and second sides of each of the channel patterns; and a gate electrode disposed around the channel patterns, wherein the gate electrode includes a first recessed top surface between adjacent channel patterns, wherein the channel patterns are spaced apart from the substrate, and wherein the gate electrode is disposed between the substrate and the channel patterns.
Public/Granted literature
- US20200321338A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-10-08
Information query
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