Invention Grant
- Patent Title: BEOL cross-bar array ferroelectric synapse units for domain wall movement
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Application No.: US16668433Application Date: 2019-10-30
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Publication No.: US11107835B2Publication Date: 2021-08-31
- Inventor: Jin Ping Han , Ramachandran Muralidhar , Paul M. Solomon , Dennis M. Newns , Martin M. Frank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L27/11585
- IPC: H01L27/11585 ; H01L27/24 ; H01L27/11587 ; G11C11/56 ; G11C11/22

Abstract:
A method is presented for incorporating a metal-ferroelectric-metal (MFM) structure in a cross-bar array in back end of the line (BEOL) processing. The method includes forming a first electrode, forming a ferroelectric layer in direct contact with the first electrode, forming a second electrode in direct contact with the ferroelectric layer, such that the first electrode and the ferroelectric layer are perpendicular to the second electrode to form the cross-bar array, and biasing the second electrode to adjust domain wall movement within the ferroelectric layer.
Public/Granted literature
- US20200066755A1 BEOL CROSS-BAR ARRAY FERROELECTRIC SYNAPSE UNITS FOR DOMAIN WALL MOVEMENT Public/Granted day:2020-02-27
Information query
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