Invention Grant
- Patent Title: Sealed cavity structures with a planar surface
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Application No.: US16538062Application Date: 2019-08-12
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Publication No.: US11107884B2Publication Date: 2021-08-31
- Inventor: Siva P. Adusumilli , Anthony K. Stamper , Laura J. Silverstein , Cameron E. Luce
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/12 ; H01L21/84 ; H01L21/762 ; H01L29/78 ; H01L29/49 ; H01L29/51
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a planar surface and methods of manufacture. The structure includes a cavity formed in a substrate material and which has a curvature at its upper end. The cavity is covered with epitaxial material that has an upper planar surface.
Public/Granted literature
- US3121422A Vacuum regulated high compression engine Public/Granted day:1964-02-18
Information query
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