Invention Grant
- Patent Title: Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element
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Application No.: US15767677Application Date: 2016-10-11
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Publication No.: US11107971B2Publication Date: 2021-08-31
- Inventor: Kenji Shibata , Kazutoshi Watanabe , Fumimasa Horikiri
- Applicant: SCIOCS COMPANY LIMITED , SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Ibaraki; JP Tokyo
- Assignee: SCIOCS COMPANY LIMITED,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SCIOCS COMPANY LIMITED,SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Ibaraki; JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2015-204179 20151016
- International Application: PCT/JP2016/080105 WO 20161011
- International Announcement: WO2017/065133 WO 20170420
- Main IPC: H01L41/18
- IPC: H01L41/18 ; B41J2/14 ; H03H9/02 ; H01L41/318 ; C23C14/08 ; H01L41/08 ; H01L41/187 ; C01G33/00 ; H01L41/053 ; H01L41/316
Abstract:
There is provided a laminated substrate with a piezoelectric thin film, comprising: a substrate; an electrode film formed on the substrate; and a piezoelectric thin film formed on the electrode film, wherein the piezoelectric thin film is made of an alkali niobium oxide represented by a composition formula of (K1−xNax) NbO3 (0
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