Invention Grant
- Patent Title: MEMS microphone, a manufacturing method thereof and an electronic apparatus
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Application No.: US16619980Application Date: 2017-06-09
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Publication No.: US11111131B2Publication Date: 2021-09-07
- Inventor: Quanbo Zou
- Applicant: GOERTEK. INC
- Applicant Address: CN Shandong
- Assignee: GOERTEK. INC
- Current Assignee: GOERTEK. INC
- Current Assignee Address: CN Shandong
- Agency: Miles & Stockbridge P.C.
- Agent Ajay A. Jagtiani
- International Application: PCT/CN2017/087771 WO 20170609
- International Announcement: WO2018/223389 WO 20181213
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B3/00 ; H04R19/04 ; H04R31/00
Abstract:
A MEMS microphone, a manufacturing method thereof and an electronic apparatus are disclosed. The MEMS microphone comprises: a MEMS microphone device including a MEMS microphone chip and a mesh membrane monolithically integrated with the MEMS microphone chip; and a housing including an acoustic port, wherein the MEMS microphone device is mounted in the housing, and the mesh membrane is arranged between the MEMS microphone chip and the acoustic port as a particle filter for the MEMS microphone chip.
Public/Granted literature
- US20210078856A1 A MEMS MICROPHONE, A MANUFACTURING METHOD THEREOF AND AN ELECTRONIC APPARATUS Public/Granted day:2021-03-18
Information query
