Optical displacement meter
Abstract:
The optical displacement meter generates, from each position of a plurality of pixel rows in a U direction and a peak position in a V direction, a plurality of profiles of the X-Z cross section, and measures a three-dimensional shape of the measuring object based on the plurality of profiles acquired at different positions in the Y direction. The optical displacement meter determines, based on whether a profile exists in a blind spot region in which it is impossible to measure a height which occurs in a Y-Z cross section corresponding to an angle formed between a light projecting axis of a light projecting section and a light receiving axis of an image sensor based on a principle of triangulation, a part of the three-dimensional shape generated by a measuring unit as an erroneous detection value.
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