Invention Grant
- Patent Title: Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
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Application No.: US16320085Application Date: 2017-07-21
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Publication No.: US11112247B2Publication Date: 2021-09-07
- Inventor: Munetaka Soejima
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Volpe Koenig
- Priority: JPJP2016-146350 20160726
- International Application: PCT/JP2017/026392 WO 20170721
- International Announcement: WO2018/021167 WO 20180201
- Main IPC: G01C19/5642
- IPC: G01C19/5642 ; G01C19/5747 ; G01C19/574 ; H01L41/047 ; H01L41/113

Abstract:
An angular velocity sensor includes a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body includes a pair of frames, a pair of drive arms, and a pair of detection arms. The pair of frames face each other in a y-axis direction in an orthogonal coordinate system xyz. The pair of drive arms are respectively laid bridging the pair of frames and face each other in an x-axis direction. The pair of detection arms extend from the pair of frames in the y-axis direction at positions between the pair of drive arms in the x-axis direction. The drive circuit applies voltages of mutually reverse phases to the pair of drive arms so that the drive arms vibrate bending to mutually reverse sides in the x-axis direction. The detection circuit detects signals generated due to the bending deformations of the pair of detection arms in a z-axis direction.
Public/Granted literature
- US20190271544A1 ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR Public/Granted day:2019-09-05
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