Invention Grant
- Patent Title: Secondary sense loop with force feedback capability
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Application No.: US16300167Application Date: 2017-05-11
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Publication No.: US11112248B2Publication Date: 2021-09-07
- Inventor: Rauli Collin , Konsta Wjuga , Lasse Aaltonen
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20165403 20160511
- International Application: PCT/IB2017/000547 WO 20170511
- International Announcement: WO2017/195020 WO 20171116
- Main IPC: G01C19/5776
- IPC: G01C19/5776

Abstract:
A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.
Public/Granted literature
- US20190145773A1 A SECONDARY SENSE LOOP WITH FORCE FEEDBACK CAPABILITY Public/Granted day:2019-05-16
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