Invention Grant
- Patent Title: Methods and systems for self-testing MEMS inertial sensors
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Application No.: US16029841Application Date: 2018-07-09
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Publication No.: US11112269B2Publication Date: 2021-09-07
- Inventor: William A. Clark
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C25/00
- IPC: G01C25/00 ; G01P21/00 ; G01C19/5656 ; G01P15/08 ; G01P15/125

Abstract:
Techniques for self-testing of microelectromechanical systems (MEMS) inertial sensors are described. Some techniques involve testing inertial sensor characteristics such as an accelerometer's sensitivity to acceleration and a gyroscope's sensitivity to angular motion. The tests may be performed by providing a test signal, which simulates a stimulus such as an acceleration or angular rate, to a MEMS inertial sensor and examining the sensor's output. The efficacy of such self-tests may be impaired by spurious signals, which may be present in the sensor's environment and may influence the sensor's output. Accordingly, the self-testing techniques described herein involve detecting the presence of any such spurious signals and discarding self-test results when their presence is detected. In some embodiments, the presence of spurious signals may be detected using a signal obtained by mixing the response of the MEMS inertial sensor with a reference signal substantially in quadrature with the test signal.
Public/Granted literature
- US20200011702A1 METHODS AND SYSTEMS FOR SELF-TESTING MEMS INERTIAL SENSORS Public/Granted day:2020-01-09
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