Invention Grant
- Patent Title: Resonator and resonator system including the same and method of manufacturing the resonator
-
Application No.: US16398449Application Date: 2019-04-30
-
Publication No.: US11112297B2Publication Date: 2021-09-07
- Inventor: Yongseop Yoon , Sungchan Kang , Cheheung Kim , Choongho Rhee , Hyeokki Hong
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2018-0143903 20181120
- Main IPC: G01H11/08
- IPC: G01H11/08 ; H01L41/25 ; H01L41/113

Abstract:
Provided are resonators, a resonator system including the resonators, and a method of manufacturing the resonators. The resonator includes a vibration beam configured to vibrate in response to an external signal, a sensing unit configured to detect the movement of the vibration beam, and a lumped mass unit including a base unit that contacts the vibration beam and a wing unit arranged separately from the vibration beam on the base unit.
Public/Granted literature
- US20200158564A1 RESONATOR AND RESONATOR SYSTEM INCLUDING THE SAME AND METHOD OF MANUFACTURING THE RESONATOR Public/Granted day:2020-05-21
Information query