Invention Grant
- Patent Title: Particle measuring method and detection liquid
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Application No.: US16807459Application Date: 2020-03-03
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Publication No.: US11112344B2Publication Date: 2021-09-07
- Inventor: Hiroshi Tomita , Hidekazu Hayashi , Eishi Shiobara , Kaoru Kondo , Takuya Tabuchi , Kazuna Bando , Sota Kondo
- Applicant: Kioxia Corporation , RION Co., Ltd.
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: Kioxia Corporation,RION Co., Ltd.
- Current Assignee: Kioxia Corporation,RION Co., Ltd.
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner L.L.P.
- Priority: JPJP2019-043031 20190308
- Main IPC: G01N15/14
- IPC: G01N15/14 ; G01N15/02 ; G01N21/53 ; G01N15/00
Abstract:
According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.
Public/Granted literature
- US20200284714A1 PARTICLE MEASURING METHOD AND DETECTION LIQUID Public/Granted day:2020-09-10
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