Invention Grant
- Patent Title: X-ray spectrometer
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Application No.: US16612092Application Date: 2017-05-18
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Publication No.: US11112371B2Publication Date: 2021-09-07
- Inventor: Kenji Sato , Takuro Izumi
- Applicant: Shimadzu Corporation
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Muir Patent Law, PLLC
- International Application: PCT/JP2017/018701 WO 20170518
- International Announcement: WO2018/211664 WO 20181122
- Main IPC: G01N23/207
- IPC: G01N23/207 ; G01N23/223

Abstract:
An X-ray spectrometer is provided with: an excitation source configured to irradiate excitation rays onto an irradiation area of a sample, a diffraction member provided to face the irradiation area; a slit member provided between the irradiation area and the diffraction member, the slit member having a slit extending parallel to the irradiation area and a prescribed surface of the diffraction member; an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit; a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction; and a second moving mechanism configured to position the X-ray linear sensor on a path of characteristic X-rays passed through the slit and diffracted by the prescribed surface by moving the X-ray linear sensor within a plane perpendicular to the longitudinal direction.
Public/Granted literature
- US20200225172A1 X-RAY SPECTROMETER Public/Granted day:2020-07-16
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