Invention Grant
- Patent Title: Protective film-forming composition
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Application No.: US16333551Application Date: 2017-09-15
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Publication No.: US11112696B2Publication Date: 2021-09-07
- Inventor: Yuto Hashimoto , Hikaru Tokunaga , Hiroto Ogata , Tomoya Ohashi , Yasushi Sakaida , Takahiro Kishioka
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2016-181956 20160916,JPJP2017-014819 20170130
- International Application: PCT/JP2017/033524 WO 20170915
- International Announcement: WO2018/052130 WO 20180322
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08F220/14 ; C08G59/32 ; C08G59/62 ; C09D133/12 ; C09D163/06 ; H01L21/027

Abstract:
A composition for forming protective films against aqueous hydrogen peroxide solutions, including: a compound of the following formula (1a) or formula (1b) or a compound having a substituent of the following formula (2) and having a molecular weight of 300 or more and less than 800 or a weight-average molecular weight of 300 or more and less than 800; and a solvent, the composition containing the compound of the formula (1a) or formula (1b) of 0.1% by mass to 60% by mass or the compound having the substituent of the formula (2) of 10% by mass to 100% by mass, relative to solids excluding the solvent: (wherein R1 is a C1-4 alkylene or alkenylene group or a direct bond, k is 0 or 1, m is an integer of 1 to 3, and n is an integer of 2 to 4.)
Public/Granted literature
- US20200183282A1 PROTECTIVE FILM-FORMING COMPOSITION Public/Granted day:2020-06-11
Information query
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