Invention Grant
- Patent Title: Motor, dual stroke stage and lithographic apparatus
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Application No.: US16756629Application Date: 2018-09-05
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Publication No.: US11112705B2Publication Date: 2021-09-07
- Inventor: Joost Johan Bolder , Peter Michel Silvester Maria Heijmans , Jeroen Van Duivenbode , Ruud Hubertus Silvester Vrenken
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP17196860 20171017,EP18160692 20180308
- International Application: PCT/EP2018/073792 WO 20180905
- International Announcement: WO2019/076525 WO 20190425
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02P25/064 ; H02P6/00 ; H02K41/03 ; H02P6/182

Abstract:
The invention relates to a motor (LD) comprising: a stationary part (STP), comprising: a row of coil assemblies (UCA,LCA), the coil assemblies having multiple phases, a movable part (MP), comprising: a row of permanent magnets (UPM,LPM), wherein the row of coil assemblies has a first length and the row of permanent magnets has a second length, wherein the second length is smaller than the first length, wherein the coil assemblies are arranged to interact with permanent magnets aligned with the coil assemblies to generate a driving force, a comparator to compare a position measurement signal representative for an actual position of the movable part with a set-point signal representative for a desired position of the movable part to provide an error signal; a motion feedback controller configured to provide a control signal on the basis of the error signal; at least one current amplifier configured to provide an actuation signal to the coil assemblies on the basis of the control signal, wherein the motor comprises a feedforward device, wherein the feedforward device is configured to provide a current amplifier feedforward signal on the basis of the set-point signal, or a derivative thereof, wherein the current amplifier feedforward signal is provided to the at least one current amplifier to compensate for unbalanced back electromotive forces on one or more of the coil assemblies due to the one or more coil assemblies being only partly aligned with the permanent magnets.
Public/Granted literature
- US20200326636A1 Motor, Dual Stroke Stage and Lithographic Apparatus Public/Granted day:2020-10-15
Information query
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