Invention Grant
- Patent Title: Fume-removing device
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Application No.: US15113221Application Date: 2015-01-16
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Publication No.: US11114325B2Publication Date: 2021-09-07
- Inventor: Bum Je Woo , Sang Hyun Kim , Myoung Sok Han , Young Chul Kim
- Applicant: Bum Je Woo
- Applicant Address: KR Seongnam-si
- Assignee: Bum Je Woo
- Current Assignee: Bum Je Woo
- Current Assignee Address: KR Seongnam-si
- Priority: KR10-2014-0007368 20140121
- International Application: PCT/KR2015/000461 WO 20150116
- International Announcement: WO2015/111878 WO 20150730
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677

Abstract:
The present invention relates to an apparatus for removing fume which includes, a wafer cassette for stacking wafers; and an exhaust for exhausting the fume of the wafers stacked in the wafer cassette, wherein the wafer cassette includes stacking shelves provided at both sides for stacking wafers; and a front opening for incoming and outgoing of the wafers which are being stacked in the stacking shelf, wherein the stacking shelves include multiple inclined ramp portions which are slanted towards the wafers stacked in the stacking shelves as they travel towards the front opening, wherein a purge gas outlet is provided in the inclined ramp portion for supplying purge gas for the wafers stacked in the stacking shelves. According to the present invention, the residual process gases on wafers can be removed efficiently.
Public/Granted literature
- US20170011942A1 FUME-REMOVING DEVICE Public/Granted day:2017-01-12
Information query
IPC分类: