Methods for loading or unloading substrate with evaporator planet
Abstract:
Implementations of methods of loading an evaporator may include, using a robotic arm, removing a substrate from a cassette and centering the substrate on a substrate aligner. The method may include aligning the substrate using the substrate aligner. The substrate may also include removing the substrate from the substrate aligner using the robotic arm and loading the substrate into a first available pocket of a planet of an evaporator using the robotic arm. The method may also include rotating the planet to a second available pocket after detecting a presence of the substrate in the first available pocket.
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