Invention Grant
- Patent Title: Array substrate and manufacturing method thereof
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Application No.: US16094315Application Date: 2018-08-23
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Publication No.: US11114477B2Publication Date: 2021-09-07
- Inventor: Caiqin Chen , Xing Ming
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Kirton McConkie
- Agent Evan R. Witt
- Priority: CN201810726708.3 20180704
- International Application: PCT/CN2018/101962 WO 20180823
- International Announcement: WO2020/006831 WO 20200109
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; H01L29/66 ; H01L27/32 ; H01L51/00 ; H01L51/56

Abstract:
In a method for manufacturing an array substrate, a first photoresist pattern is formed on a buffer layer of a non-display region and the buffer layer uncovered by the first photoresist pattern is removed to form a first via hole in the non-display region. A second via hole is formed on the basis of the first via hole. The second via hole is connected to the first via hole. By forming the first via hole in the non-display region and forming the second via hole on the basis of the first via hole, completeness of film layers is ensured and product yield is improved.
Public/Granted literature
- US20210233941A1 ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-07-29
Information query
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