Invention Grant
- Patent Title: Capacitor including first electrode, dielectric layer, and second electrode, image sensor, and method for producing capacitor
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Application No.: US16118220Application Date: 2018-08-30
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Publication No.: US11114481B2Publication Date: 2021-09-07
- Inventor: Yuuko Tomekawa , Takahiro Koyanagi , Takeyoshi Tokuhara
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will and Emery LLP
- Priority: JPJP2017-175022 20170912
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/28 ; H01L27/108 ; H01L21/02 ; H01L27/146 ; H01L49/02
Abstract:
A capacitor includes a first electrode, a second electrode facing the first electrode, and a dielectric layer disposed between the first and second electrodes and being in contact with each of the first and second electrodes. The dielectric layer has a thickness of 10 nm or more. The first electrode contains carbon. At the interface between the dielectric layer and the first electrode, an elemental percentage of carbon is 30 atomic % or less.
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