Invention Grant
- Patent Title: Integrated circuit device having fin-type active
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Application No.: US16552150Application Date: 2019-08-27
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Publication No.: US11114544B2Publication Date: 2021-09-07
- Inventor: Dae-young Kwak , Ji-ye Kim , Jung-hwan Chun , Min-chan Gwak , Dong-hyun Roh , Jin-wook Lee , Sang-jin Hyun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0146777 20181123
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/66 ; H01L27/11 ; H01L27/092 ; H01L21/8238 ; H01L29/78 ; H01L29/45

Abstract:
An integrated circuit device includes a fin-type active region protruding from a top surface of a substrate and extending in a first direction parallel to the top surface of the substrate, a gate structure intersecting with the fin-type active region and extending on the substrate in a second direction perpendicular to the first direction, a source/drain region on a first side of the gate structure, a first contact structure on the source/drain region, and a contact capping layer on the first contact structure. A top surface of the first contact structure has a first width in the first direction, a bottom surface of the contact capping layer has a second width greater than the first width stated above in the first direction, and the contact capping layer includes a protruding portion extending outward from a sidewall of the first contact structure.
Public/Granted literature
- US20200168720A1 INTEGRATED CIRCUIT DEVICE Public/Granted day:2020-05-28
Information query
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