Invention Grant
- Patent Title: Field effect transistor with negative capacitance dieletric structures
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Application No.: US16573334Application Date: 2019-09-17
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Publication No.: US11114547B2Publication Date: 2021-09-07
- Inventor: Chansyun David Yang , Keh-Jeng Chang , Chan-Lon Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L29/06 ; H01L29/40 ; H01L29/78 ; H01L21/311 ; H01L21/3065 ; H01L21/02

Abstract:
The structure of a semiconductor device with negative capacitance (NC) dielectric structures and a method of fabricating the semiconductor device are disclosed. A method of fabricating the semiconductor device includes forming a fin structure with a fin base portion and a fin top portion on a substrate, forming a spacer structure in a first region of the fin top portion, and forming a gate structure on a second region of the fin top portion. The spacer structure includes a first NC dielectric material and the gate structure includes a gate dielectric layer with a second NC dielectric material different from the first NC dielectric material.
Public/Granted literature
- US20210083074A1 FIELD EFFECT TRANSISTOR WITH NEGATIVE CAPACITANCE DIELETRIC STRUCTURES Public/Granted day:2021-03-18
Information query
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