Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16211830Application Date: 2018-12-06
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Publication No.: US11121062B2Publication Date: 2021-09-14
- Inventor: Hsih-Yang Chiu
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds and Lowe, P.C.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/528 ; H01L21/768 ; H01L23/532

Abstract:
The present disclosure relates to a semiconductor device and method of manufacturing the same. The semiconductor device includes a substrate and a through silicon via structure. The through silicon via is disposed in the substrate and includes an insulation layer and a plurality of conductive lines. The conductive lines are separated from each other by the insulation layer and extend from a top surface of the insulation layer to a bottom surface opposite to the top surface.
Public/Granted literature
- US20200161219A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-05-21
Information query
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