Invention Grant
- Patent Title: Methods of forming a conductive contact structure to an embedded memory device on an IC product and a corresponding IC product
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Application No.: US16726447Application Date: 2019-12-24
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Publication No.: US11121087B2Publication Date: 2021-09-14
- Inventor: Nicholas LiCausi , Julien Frougier , Keith Donegan , Hyung Woo Kim
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/532 ; H01L21/768 ; H01L23/528 ; G11C5/06

Abstract:
One illustrative device disclosed herein includes a layer of insulating material having an upper surface positioned at a first level and a recessed conductive interconnect structure positioned at least partially within the layer of insulating material, wherein the recessed conductive interconnect structure has a recessed upper surface that is positioned at a second level that is below the first level. In this example, the device also includes a recess defined in the recessed conductive interconnect structure, a memory cell positioned above the recessed conductive interconnect structure and a conductive via plug that is conductively coupled to the recessed conductive interconnect structure and a lower conductive material of the memory cell, wherein at least a portion of the conductive via plug is positioned in the recess defined in the recessed conductive interconnect.
Public/Granted literature
Information query
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