Invention Grant
- Patent Title: Y-theta table for semiconductor equipment
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Application No.: US16136466Application Date: 2018-09-20
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Publication No.: US11121115B2Publication Date: 2021-09-14
- Inventor: Jan Van Eijk , Ronald Maarten Schneider , Jasper Anne Frido Marikus Simons , Timotheus Hubertus Christiaan Groothuijsen
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee: ASM Technology Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: B23K20/10
- IPC: B23K20/10 ; H01L23/00 ; H01L21/68

Abstract:
A positioning table, for example for a wire bonder has first and second arms, each of said first and second arms being independently drivable linearly along a first axis, and a stage that is engaged with both the first and second arms. The stage engages with each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly along the first axis, and rotatable about a rotary axis coincident with a center-point of the stage, the rotary axis being orthogonal to the first axis. Each engagement mechanism is configured to permit a respective distance between the center-point of the stage and an end of each of the first and second arms to vary during movement of an arm along the first axis.
Public/Granted literature
- US20200098722A1 Y-THETA TABLE FOR SEMICONDUCTOR EQUIPMENT Public/Granted day:2020-03-26
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