Invention Grant
- Patent Title: Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope
-
Application No.: US16542053Application Date: 2019-08-15
-
Publication No.: US11127560B2Publication Date: 2021-09-21
- Inventor: Johannes A. H. W. G. Persoon , Andreas Theodorus Engelen , Ruud Schampers
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: EP18190045 20180821
- Main IPC: H01J37/252
- IPC: H01J37/252 ; H01J37/244 ; G02B21/34 ; H01J37/20

Abstract:
The invention relates to a charged particle microscope (CPM) that at least includes a sample holder, for holding a sample, and a manipulator device arranged for transferring a lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability, accessibility, and monitorability of the manipulator device during use.
Public/Granted literature
Information query