Invention Grant
- Patent Title: Processing method of workpiece
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Application No.: US16256647Application Date: 2019-01-24
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Publication No.: US11133186B2Publication Date: 2021-09-28
- Inventor: Nobuyasu Kitahara
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Main IPC: H01L21/033
- IPC: H01L21/033 ; H01L21/02 ; H01L21/027 ; H01L21/67 ; H01L21/683
Abstract:
There is provided a processing method of a workpiece. In the processing method, a protective film including a water-insoluble resin is formed on the front surface of a workpiece and the workpiece on which the protective film is formed is processed. Furthermore, the protective film is deteriorated by supplying an organic solvent to the workpiece processed and the protective film is removed from the front surface of the workpiece by supplying cleaning water to the protective film deteriorated.
Public/Granted literature
- US20200090934A1 PROCESSING METHOD OF WORKPIECE Public/Granted day:2020-03-19
Information query
IPC分类:
