- Patent Title: Short-wave infrared detector array and fabrication methods thereof
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Application No.: US16764498Application Date: 2017-11-21
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Publication No.: US11133349B2Publication Date: 2021-09-28
- Inventor: Claude Meylan
- Applicant: IRIS INDUSTRIES SA
- Applicant Address: CH Saint-Aubin-Sauges
- Assignee: IRIS INDUSTRIES SA
- Current Assignee: IRIS INDUSTRIES SA
- Current Assignee Address: CH Saint-Aubin-Sauges
- Agency: Nixon & Vanderhye
- International Application: PCT/EP2017/079964 WO 20171121
- International Announcement: WO2019/101300 WO 20190531
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/263 ; H01L21/306

Abstract:
Disclosed are methods of fabricating short-wave infrared detector arrays including readout and absorption wafers connected by a recrystallized a-Si layer. The absorber wafer includes a SWIR conversion layer with a Ge1-xSnx alloy composition. Process steps realize the readout wafer and a portion of the absorption wafer, including bonding the readout wafer and a first portion of the absorption wafer. The a-Si intermediate layer linking the readout wafer and the first portion of the absorption wafer the a-Si intermediate layer is recrystallized by applying heat by a light source. The method assures a temperature profile between the light entrance surface and the CMOS electronic layer of the readout wafer maintaining readout layer temperature
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