Invention Grant
- Patent Title: 3D semiconductor device and structure
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Application No.: US17223822Application Date: 2021-04-06
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Publication No.: US11133351B2Publication Date: 2021-09-28
- Inventor: Deepak C. Sekar , Zvi Or-Bach
- Applicant: Monolithic 3D Inc.
- Applicant Address: US OR Klamath Falls
- Assignee: Monolithic 3D Inc.
- Current Assignee: Monolithic 3D Inc.
- Current Assignee Address: US OR Klamath Falls
- Agency: Power Patent
- Agent Bao Tran
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/24 ; H01L21/268 ; H01L21/683 ; H01L21/762 ; H01L21/822 ; H01L21/84 ; H01L27/06 ; H01L27/108 ; H01L27/11 ; H01L27/11529 ; H01L27/11551 ; H01L27/11578 ; H01L27/12 ; H01L29/78 ; H01L29/423 ; H01L27/22 ; H01L27/105 ; H01L27/11526 ; H01L27/11573 ; H01L45/00

Abstract:
A 3D semiconductor device, the device including: a first level including a first single crystal layer and first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer and second transistors, where the second level overlays the first level, where the second transistors are horizontally oriented and include a gate dielectric, where the gate dielectric includes hafnium oxide, where the second level is bonded to the first level, and where the bonded includes oxide to oxide bonds.
Public/Granted literature
- US20210249473A1 3D SEMICONDUCTOR DEVICE AND STRUCTURE Public/Granted day:2021-08-12
Information query
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