Wafer transport container interior atmosphere measurement device, wafer transport container, wafer transport container interior cleaning device, and wafer transport container interior cleaning method
Abstract:
A wafer transport container interior atmosphere measurement device is arranged in wafer transport container. The device detects an atmosphere in the wafer transport container and communicates the atmosphere. The device includes a detector, a transmitter, and a power source. The detector detects the atmosphere in the wafer transport container. The transmitter wirelessly transmits a first information including a detection result by the detector to an external receiver. The power source supplies electric power to the detector and the transmitter.
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