Invention Grant
- Patent Title: Plasma etching apparatus and plasma etching method
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Application No.: US16832227Application Date: 2020-03-27
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Publication No.: US11145493B2Publication Date: 2021-10-12
- Inventor: Satoshi Tanaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2019-063648 20190328
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/16 ; H01L21/3065 ; H05H1/46 ; H01L21/02 ; H01J37/248

Abstract:
A plasma etching apparatus includes a processing vessel, a stage, a gas supply, a first high frequency power supply, a second high frequency power supply and a control device. The stage is provided and configured to place thereon a substrate. The gas supply is configured to supply a processing gas. The first high frequency power supply is configured to supply a first high frequency power. The second high frequency power supply is configured to supply a second high frequency power to the stage. The control device controls a supply and a stop of the supply of each of the first and the second high frequency powers at every preset cycle. The first and the second high frequency powers are supplied exclusively. A ratio of a supply time with respect to a single cycle of the first high frequency power is lower than that of the second high frequency power.
Public/Granted literature
- US20200312622A1 PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD Public/Granted day:2020-10-01
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