Invention Grant
- Patent Title: Field effect transistor with an atomically thin channel
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Application No.: US16647265Application Date: 2018-09-11
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Publication No.: US11145549B2Publication Date: 2021-10-12
- Inventor: Thomas Alava , Thomas Ernst , Zheng Han
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1758588 20170915
- International Application: PCT/FR2018/052211 WO 20180911
- International Announcement: WO2019/053362 WO 20190321
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; G01N27/414 ; H01L21/02 ; H01L29/16 ; H01L29/417 ; H01L27/088 ; H01L29/66 ; H01L29/78

Abstract:
Production of a transistor, the channel structure of which comprises at least one finned channel structure, the method comprising: forming, from a substrate (1), a molding block (3), forming, on the molding block, a thin layer (7) made from a given semiconductor or semi-metallic material, and consisting of one to ten atomic or molecular monolayers of two-dimensional crystal, withdrawing the molding block while retaining a portion (7a) of the thin layer extending against a lateral face of the molding block, said retained portion (7a) forming a fin that is capable of forming a channel structure of the transistor, producing a coating gate electrode against said fin.
Public/Granted literature
- US20200258783A1 FIELD EFFECT TRANSISTOR WITH AN ATOMICALLY THIN CHANNEL Public/Granted day:2020-08-13
Information query
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