- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US16810010Application Date: 2020-03-05
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Publication No.: US11145590B2Publication Date: 2021-10-12
- Inventor: Hiroyuki Ode
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-144870 20190806
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/532 ; H01L25/065 ; H01L45/00 ; H01L27/24 ; H01L23/00

Abstract:
According to one embodiment, a semiconductor memory device includes: a substrate including a first area, a second area, and a third area, the second and the third areas being adjacent to the first area; a first insulating layer disposed in the first to the third areas; a first wiring disposed on a surface of the first insulating layer in the first area; a first memory cell disposed on the first wiring; a second wiring disposed on the first memory cell; and a contact connected to the second wiring in the second area. The surface of the first insulating layer includes: first surfaces disposed in at least one of the second area and the third area and arranged in the first direction; and second surfaces disposed between the first surfaces. The second surfaces are close to or far from the substrate compared with the first surfaces.
Public/Granted literature
- US20210043559A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-02-11
Information query
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