Invention Grant
- Patent Title: Monolithic silicon photomultiplier array
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Application No.: US16577035Application Date: 2019-09-20
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Publication No.: US11145778B2Publication Date: 2021-10-12
- Inventor: Caner Onal , Pierre-Yves Droz , Nirav Dharia
- Applicant: Waymo LLC
- Applicant Address: US CA Mountain View
- Assignee: Waymo LLC
- Current Assignee: Waymo LLC
- Current Assignee Address: US CA Mountain View
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/0232 ; G01S7/481 ; H01L31/18 ; H01L27/144

Abstract:
An optical system may include a substrate and a plurality of silicon photomultipliers (SiPMs) monolithically integrated with the substrate. Each SiPM may include a plurality of single photon avalanche diodes (SPADs). The optical system also includes an aperture array having a plurality of apertures. The plurality of SiPMs and the aperture array are aligned so as to define a plurality of receiver channels. Each receiver channel includes a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures.
Public/Granted literature
- US20210091251A1 Monolithic Silicon Photomultiplier Array Public/Granted day:2021-03-25
Information query
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