- Patent Title: Adhesion layer to enhance encapsulation of superconducting devices
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Application No.: US16681295Application Date: 2019-11-12
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Publication No.: US11145801B2Publication Date: 2021-10-12
- Inventor: Richard Alan Haight , Ali Afzali-Ardakani , Vivekananda P. Adiga , Martin O. Sandberg , Hanhee Paik
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L39/02
- IPC: H01L39/02 ; G06N10/00 ; H01L39/24 ; H01L39/22

Abstract:
Techniques regarding encapsulating one or more superconducting devices of a quantum processor are provided. For example, one or more embodiments described herein can regard a method that can comprise depositing an adhesion layer onto a superconducting resonator and a silicon substrate that are comprised within a quantum processor. The superconducting resonator can be positioned on the silicon substrate. Also, the adhesion layer can comprise a chemical compound having a thiol functional group.
Public/Granted literature
- US20210143309A1 ADHESION LAYER TO ENHANCE ENCAPSULATION OF SUPERCONDUCTING DEVICES Public/Granted day:2021-05-13
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