Invention Grant
- Patent Title: Solidly-mounted transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
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Application No.: US16941458Application Date: 2020-07-28
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Publication No.: US11146244B2Publication Date: 2021-10-12
- Inventor: Ventsislav Yantchev , Viktor Plesski , Bryant Garcia
- Applicant: Resonant Inc.
- Applicant Address: US CA Goleta
- Assignee: Resonant Inc.
- Current Assignee: Resonant Inc.
- Current Assignee Address: US CA Goleta
- Agency: SoCal IP Law Group LLP
- Agent John E. Gunther
- Main IPC: H03H9/56
- IPC: H03H9/56 ; H03H9/02 ; H03H9/13 ; H03H9/17 ; H01L41/047 ; H03H3/02

Abstract:
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator device includes a substrate, a single-crystal lithium niobate plate, an acoustic Bragg reflector sandwiched between a surface of the substrate and a back surface of the lithium niobate plate, wherein the acoustic Bragg reflector includes a plurality of layers alternating between high acoustic impedance layers and low acoustic impedance layers, wherein all of the plurality of layers are dielectric materials, and wherein the high acoustic impedance layers are one of silicon nitride and aluminum nitride and the low acoustic impedance layers are carbon-containing silicon oxide, and an interdigital transducer (IDT) formed on a front surface of the lithium niobate plate. Euler angles of the lithium niobate plate are [0°, β, 0°], where β is greater than or equal to 0° and less than or equal to 60°.
Information query
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