Invention Grant
- Patent Title: Semiconductor device with reduced contact resistance
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Application No.: US16674288Application Date: 2019-11-05
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Publication No.: US11152252B2Publication Date: 2021-10-19
- Inventor: Kangguo Cheng , Sean Teehan , Alex J. Varghese
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Kurt Goudy
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532 ; H01L23/31 ; H01L23/535

Abstract:
An interconnect structure and methods of forming the interconnect structure an interconnect dielectric including at least one contact landing within the interconnect dielectric and/or underlying the interconnect dielectric. The structure and methods include roughening an exposed surface of at least one contact landing to increase the surface area of a conductive metal subsequently disposed in a contact feature and in direct contact with the roughened surface of the least one contact landing.
Public/Granted literature
- US20200075400A1 SEMICONDUCTOR DEVICE WITH REDUCED CONTACT RESISTANCE Public/Granted day:2020-03-05
Information query
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