Invention Grant
- Patent Title: Different scaling ratio in FEOL / MOL/ BEOL
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Application No.: US16432078Application Date: 2019-06-05
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Publication No.: US11152303B2Publication Date: 2021-10-19
- Inventor: Liang-Yao Lee , Tsung-Chieh Tsai , Juing-Yi Wu , Chun-Yi Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L29/49 ; H01L27/02 ; G06F30/39 ; H01L29/06 ; H01L23/528 ; G06F30/398

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip has a plurality of gate structures disposed over a substrate. A plurality of metal structures continuously extend from lower surfaces contacting the plurality of gate structures to upper surfaces contacting one or more interconnects within an overlying conductive interconnect layer. The plurality of metal structures are arranged at a first pitch that is larger than a second pitch of the plurality of gate structures.
Public/Granted literature
- US20190287905A1 DIFFERENT SCALING RATIO IN FEOL / MOL/ BEOL Public/Granted day:2019-09-19
Information query
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