Invention Grant
- Patent Title: Static random-access memory (SRAM) and manufacture thereof
-
Application No.: US16570610Application Date: 2019-09-13
-
Publication No.: US11152379B2Publication Date: 2021-10-19
- Inventor: Yong Li
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Innovation Counsel LLP
- Priority: CN201710355742.X 20170519
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/11 ; H01L21/8238 ; H01L29/423 ; H01L29/49 ; H01L29/786

Abstract:
A Static Random-Access Memory (SRAM) device and its manufacturing method are presented, relating to semiconductor techniques. The SRAM device includes: a substrate; a first semiconductor column for Pull-Up (PU) transistors and a second semiconductor column for Pull-Down (PD) transistors, with both the first and the second semiconductor columns on the substrate; a first separation region, and a gate stack structure. The first separation region is between the first and the second semiconductor columns and comprises a first region and a second region, the gate stack structure comprises a gate dielectric layer comprising a first part and a second part; a P-type work function regulation layer comprising a first area and a second area adjacent to each other; a N-type work function regulation layer comprising a third area and a fourth area adjacent to each other; and a gate on both the P-type and N-type work function regulation layers.
Public/Granted literature
- US20200006357A1 STATIC RANDOM-ACCESS MEMORY (SRAM) AND MANUFACTURE THEREOF Public/Granted day:2020-01-02
Information query
IPC分类: