Invention Grant
- Patent Title: Semiconductor device having fins
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Application No.: US16525346Application Date: 2019-07-29
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Publication No.: US11152462B2Publication Date: 2021-10-19
- Inventor: Cong-Min Fang , Kang-Min Kuo , Shi-Min Wu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/762

Abstract:
A semiconductor device includes a semiconductive substrate, a first semiconductive fin and a second semiconductive fin extending upwards from the semiconductive substrate, an isolation structure at least partially between the first semiconductive fin and the second semiconductive fin, a first semiconductive raised portion and a second semiconductive raised portion. The first semiconductive raised portion extends upwards from the semiconductive substrate, is buried under the isolation structure, and is between the first semiconductive fin and the second semiconductive fin. A top surface of the first semiconductive fin is higher than a top surface of the first semiconductive raised portion. The second semiconductive raised portion extends upwards from the semiconductive substrate, is buried under the isolation structure, and is between the first semiconductive raised portion and the second semiconductive fin.
Public/Granted literature
- US20190355814A1 SEMICONDUCTOR DEVICE HAVING FINS Public/Granted day:2019-11-21
Information query
IPC分类: