Invention Grant
- Patent Title: Merged pillar structures and method of generating layout diagram of same
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Application No.: US16698308Application Date: 2019-11-27
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Publication No.: US11157677B2Publication Date: 2021-10-26
- Inventor: Hiranmay Biswas , Chung-Hsing Wang , Kuo-Nan Yang , Yi-Kan Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G06F30/394
- IPC: G06F30/394 ; H01L27/02 ; G06F30/398 ; H01L27/118 ; G06F119/06

Abstract:
A method of a layout diagram (of a conductive line structure for an IC) including: for a first set of pillar patterns included in an initial layout diagram that represents portions of an M(i) layer of metallization and where i is a non-negative number, the first set including first and second pillar patterns which are non-overlapping of each other, which have long axes that are substantially collinear with a reference line, and which have a first distance of separation, determining a first distance of separation as between corresponding immediately adjacent members of the first set; recognizing that the first distance is less than a transverse routing (TVR) separation threshold for an M(i+j) layer of metallization, where j is an integer and j≥2; and increasing the first distance so as to become a second distance which is greater than the TVR separation threshold of the M(i+j) layer.
Public/Granted literature
- US20200175220A1 MERGED PILLAR STRUCTURES AND METHOD OF GENERATING LAYOUT DIAGRAM OF SAME Public/Granted day:2020-06-04
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