An evaluation device may include: a receiving unit that receives an image of the semiconductor substrate, the image captured by an imaging device provided on the semiconductor substrate manufacturing apparatus; a determination unit that determines, using a neural network, at least one value representative of a probability of a machine learning device outputting an erroneous output for the image, the machine learning device configured to: (i) receive the image of the semiconductor substrate, (ii) perform computation using the received image, and (iii) output information indicating the quality of the semiconductor substrate based on a result of the computation; and an output unit that outputs an output based on the at least one value representative of the probability. The neural network has been trained using: images of manufactured semiconductor substrates; and information indicating, for each one of the images, a level of erroneousness for an output from the machine learning device.