Invention Grant
- Patent Title: Target assembly for safe and economic evaporation of brittle materials
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Application No.: US16618786Application Date: 2018-05-30
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Publication No.: US11158491B2Publication Date: 2021-10-26
- Inventor: Joerg Kerschbaumer , Hamid Bolvardi , Siegfried Krassnitzer , Markus Esselbach
- Applicant: Oerlikon Surface Solutions AG, Pfäffikon
- Applicant Address: CH Pfäffikon
- Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee Address: CH Pfäffikon
- Priority: CH00708/17 20170601
- International Application: PCT/EP2018/064281 WO 20180530
- International Announcement: WO2018/220067 WO 20181206
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/14 ; C23C14/34

Abstract:
The present invention discloses a target assembly which allows safe, fracture-free and economic operation of target materials with low fracture toughness and/or bending strength during arc evaporation processes as well as in sputtering processes. The present invention discloses a target assembly for PVD processes, comprising a target, and a target holding device (20), characterized in that the target (10) comprises a first bayonet lock and the target holding device (20) comprises a counterbody for the first bayonet lock of the target and a second bayonet lock for engaging the target assembly in the cooling means of the deposition chamber.
Public/Granted literature
- US20200090915A1 TARGET ASSEMBLY FOR SAFE AND ECONOMIC EVAPORATION OF BRITTLE MATERIALS Public/Granted day:2020-03-19
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