Invention Grant
- Patent Title: Beam intensity converting film, and method of manufacturing beam intensity converting film
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Application No.: US16080642Application Date: 2017-04-20
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Publication No.: US11177116B2Publication Date: 2021-11-16
- Inventor: Mutsuaki Murakami , Atsushi Tatami , Masamitsu Tachibana
- Applicant: Kaneka Corporation
- Applicant Address: JP Osaka
- Assignee: Kaneka Corporation
- Current Assignee: Kaneka Corporation
- Current Assignee Address: JP Osaka
- Agency: Osha Bergman Watanabe & Burton LLP
- Priority: JPJP2016-090934 20160428
- International Application: PCT/JP2017/015890 WO 20170420
- International Announcement: WO2017/188117 WO 20171102
- Main IPC: G02B5/22
- IPC: G02B5/22 ; H01J37/32 ; G02B5/20 ; H01J37/34 ; G21K1/10 ; G21K1/02

Abstract:
A beam intensity converting film that has sufficient shielding property, sufficient durability, and sufficient heat resistance and that can reduce the extent of radioactivation. An attenuator is constituted by a graphite film placed such that a surface thereof intersects the beam axis of a charged particle beam, the graphite film has a thickness of 1 μm or greater, and the thermal conductivity in a surface direction of the graphite film is equal to or greater than 20 times the thermal conductivity in the thickness direction of the graphite film.
Public/Granted literature
- US20190088450A1 BEAM INTENSITY CONVERTING FILM, AND METHOD OF MANUFACTURING BEAM INTENSITY CONVERTING FILM Public/Granted day:2019-03-21
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