Invention Grant
- Patent Title: Stacked vertical transport field effect transistor electrically erasable programmable read only memory (EEPROM) devices
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Application No.: US16671844Application Date: 2019-11-01
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Publication No.: US11177372B2Publication Date: 2021-11-16
- Inventor: Karthik Balakrishnan , Jeng-Bang Yau , Alexander Reznicek , Tak H. Ning
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert Sullivan
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L29/66 ; H01L29/423 ; H01L27/11521 ; H01L29/08 ; H01L29/06 ; H01L29/78

Abstract:
A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.
Public/Granted literature
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